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Analysis of silicide process defects by non-contact electro..:

, In: 30th Annual Proceedings Reliability Physics 1992,
Jenkins, K.A. ; Agnello, P.D. ; Bucelot, T.J. - p. 304,305,306,307,308 , 1992
Link: https://doi.org/10.1109/RELPHY.1992.187661