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1 Ergebnisse
1
High performance deep submicron buried channel PMOSFET usin..:
, In:
1992 International Technical Digest on Electron Devices Meeting
,
Chang
;
Kohyama
;
Kakuma
... - p. 905-908 , 1992
Link:
https://doi.org/10.1109/IEDM.1992.307503
RT T1
1992 International Technical Digest on Electron Devices Meeting
: T1
High performance deep submicron buried channel PMOSFET using P + poly-Si spacer induced self-aligned ultra shallow junctions
UL https://suche.suub.uni-bremen.de/peid=ieee-307503&Exemplar=1&LAN=DE A1 Chang A1 Kohyama A1 Kakuma A1 Sudo A1 Asao A1 Kumagai A1 Matsuoka A1 Ishiuchi A1 Sawada YR 1992 SN 0163-1918 K1 Insulated gate FETs K1 Inversion layers K1 Work function SP 905 OP 908 LK http://dx.doi.org/https://doi.org/10.1109/IEDM.1992.307503 DO https://doi.org/10.1109/IEDM.1992.307503 SF ELIB - SuUB Bremen
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