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Optimization of a gas jet-type Z-pinch discharge EUV light ..:

, In: 2006 International Symposium on Discharges and Electrical Insulation in Vacuum,
Iizuka, Naoya ; Kishi, Nozomu ; Song, Inho... - p. None , 2006
Link: https://doi.org/10.1109/DEIV.2006.357381