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1 Ergebnisse
1
Amorphization and Templated Recrystallization (ATR) Study f..:
, In:
2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
,
Huang, Yao-Tsung
;
Pinto, Angelo
;
Lin, Chien-Ting
... - p. None , 2007
Link:
https://doi.org/10.1109/VTSA.2007.378957
RT T1
2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
: T1
Amorphization and Templated Recrystallization (ATR) Study for Hybrid Orientation Technology (HOT) using Direct Silicon Bond (DSB) Substrates
UL https://suche.suub.uni-bremen.de/peid=ieee-4239525&Exemplar=1&LAN=DE A1 Huang, Yao-Tsung A1 Pinto, Angelo A1 Lin, Chien-Ting A1 Hsu, Che-Hua A1 Ramin, Manfred A1 Seacrist, Mike A1 Ries, Mike A1 Matthews, Kenneth A1 Nguyen, Billy A1 Freeman, Melissa A1 Wilks, Bruce A1 Stager, Chuck A1 Johnson, Charlene A1 Denning, Laurie A1 Bennett, Joe A1 Pilot, John A1 Joshi, Sachin A1 Lee, Tung-Hsing A1 Ma, Mike A1 Cheng, Osbert A1 Wise, Rick YR 2007 SN 1524-766X K1 MOSFETs K1 Silicon on insulator technology K1 Surface morphology K1 CMOS technology K1 Substrates K1 Crystalline materials K1 Wafer bonding K1 Ring oscillators K1 Thyristors K1 Diodes SP None LK http://dx.doi.org/https://doi.org/10.1109/VTSA.2007.378957 DO https://doi.org/10.1109/VTSA.2007.378957 SF ELIB - SuUB Bremen
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