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1 Ergebnisse
1
FinFET Process and Integration Technology for High Performa..:
, In:
2007 International Workshop on Junction Technology
,
Kawasaki, H.
;
Inaba, S.
;
Aoki, N.
... - p. None , 2007
Link:
https://doi.org/10.1109/IWJT.2007.4279933
RT T1 <cTitle>2007 International Workshop on Junction Technology</cTitle>: T1 <Title>FinFET Process and Integration Technology for High Performance LSI in 22 nm node and beyond</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-4279933&Exemplar=1&LAN=DE A1 Kawasaki, H. A1 Inaba, S. A1 Aoki, N. A1 Ishimaru, K. A1 Toyoshima, Y. A1 Kaneko, A. A1 Yagishita, A. A1 Okano, K. A1 Izumida, T. A1 Kanemura, T. A1 Suguro, K. A1 Eguchi, K. A1 Tsunashima, Y. YR 2007 K1 FinFETs K1 Large scale integration K1 Random access memory K1 FETs K1 Immune system K1 Circuits K1 Research and development K1 Toy manufacturing industry K1 Manufacturing processes K1 Pulp manufacturing SP None LK http://dx.doi.org/https://doi.org/10.1109/IWJT.2007.4279933 DO https://doi.org/10.1109/IWJT.2007.4279933 SF ELIB - SuUB Bremen
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