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1 Ergebnisse
1
A Plasma Damage Mitigation Concept for SOI Technologies: Li..:
, In:
2007 IEEE International SOI Conference
,
Pelella, Mario M.
;
Zhou, JR
;
Eppes, David
... - p. None , 2007
Link:
https://doi.org/10.1109/SOI.2007.4357860
RT T1
2007 IEEE International SOI Conference
: T1
A Plasma Damage Mitigation Concept for SOI Technologies: Lightning Rods
UL https://suche.suub.uni-bremen.de/peid=ieee-4357860&Exemplar=1&LAN=DE A1 Pelella, Mario M. A1 Zhou, JR A1 Eppes, David A1 Leary, Mike A1 Hale, Stephen A1 Noorlag, Date A1 Bullard, Larry A1 Huebler, Peter A1 Schuler, Stefan A1 Dreizner, Andreas A1 Working, Jim A1 Chan, Darin A1 Schwan, Christoph A1 Horstmann, Manfred A1 En, Bill A1 Wieczorek, Karsten A1 Greenlaw, David A1 Heidel, Thomas A1 Heinig, Volker A1 Miethke, John A1 Kepler, Nick A1 Kruegel, Stephan A1 Frohberg, Kai A1 Rivers, Jason A1 Heller, Thomas A1 Richter, Ralf A1 Rodriguez, Norma A1 Klein, Rich YR 2007 SN 1078-621X K1 Lightning K1 Plasma applications K1 Plasma materials processing K1 Etching K1 Microprocessors K1 Circuits K1 Plasma density K1 Electrons K1 Capacitors K1 Diodes SP None LK http://dx.doi.org/https://doi.org/10.1109/SOI.2007.4357860 DO https://doi.org/10.1109/SOI.2007.4357860 SF ELIB - SuUB Bremen
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