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1 Ergebnisse
1
Low complexity RF-MEMS switch optimized for operation up to..:
, In:
2007 European Microwave Integrated Circuit Conference
,
Stehle, A.
;
Siegel, C.
;
Ziegler, V.
... - p. None , 2007
Link:
https://doi.org/10.1109/EMICC.2007.4412741
RT T1
2007 European Microwave Integrated Circuit Conference
: T1
Low complexity RF-MEMS switch optimized for operation up to 120°C
UL https://suche.suub.uni-bremen.de/peid=ieee-4412741&Exemplar=1&LAN=DE A1 Stehle, A. A1 Siegel, C. A1 Ziegler, V. A1 Schonlinner, B. A1 Prechtel, U. A1 Thilmont, S. A1 Seidel, H. A1 Schmid, U. YR 2007 K1 Radiofrequency microelectromechanical systems K1 Metallization K1 Temperature distribution K1 Communication switching K1 Fabrication K1 Power semiconductor switches K1 Creep K1 Inorganic materials K1 Silicon K1 Dielectric substrates K1 RF-MEMS K1 microwave K1 switch K1 bended beams K1 thermal oxide K1 aluminium K1 alloy K1 temperature SP None LK http://dx.doi.org/https://doi.org/10.1109/EMICC.2007.4412741 DO https://doi.org/10.1109/EMICC.2007.4412741 SF ELIB - SuUB Bremen
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