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1 Ergebnisse
1
New manufacturing method for capacitive ultrasonic transduc..:
, In:
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Rey, Patrice
;
Salhi, M.
;
Giroud, S.
... - p. None , 2007
Link:
https://doi.org/10.1109/MEMSYS.2007.4432987
RT T1
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
New manufacturing method for capacitive ultrasonic transducers with monocrystalline membrane
UL https://suche.suub.uni-bremen.de/peid=ieee-4432987&Exemplar=1&LAN=DE A1 Rey, Patrice A1 Salhi, M. A1 Giroud, S. A1 Robert, P. A1 Lagahe-Blanchard, C. A1 Clatot, S. A1 Ballandras, S. YR 2007 SN 1084-6999 K1 Ultrasonic transducers K1 Biomembranes K1 Manufacturing processes K1 Wafer bonding K1 Silicon K1 Electrodes K1 Impedance measurement K1 Testing K1 Resonance K1 Bandwidth SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2007.4432987 DO https://doi.org/10.1109/MEMSYS.2007.4432987 SF ELIB - SuUB Bremen
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