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1 Ergebnisse
1
MEMS sensor for in situ TEM Atomic Force Microscopy:
, In:
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Nafari, A.
;
Karlen, D.
;
Rusu, C.
... - p. None , 2007
Link:
https://doi.org/10.1109/MEMSYS.2007.4433025
RT T1
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
MEMS sensor for in situ TEM Atomic Force Microscopy
UL https://suche.suub.uni-bremen.de/peid=ieee-4433025&Exemplar=1&LAN=DE A1 Nafari, A. A1 Karlen, D. A1 Rusu, C. A1 Svensson, K. A1 Olin, H. A1 Enoksson, P. YR 2007 SN 1084-6999 K1 Atomic force microscopy K1 Micromechanical devices K1 Force sensors K1 Transmission electron microscopy K1 Force measurement K1 Atomic measurements K1 Fabrication K1 Micromachining K1 Ion implantation K1 Etching SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2007.4433025 DO https://doi.org/10.1109/MEMSYS.2007.4433025 SF ELIB - SuUB Bremen
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