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Highly reliable and extremely stable SiGe micro-mirrors:

, In: 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS),
Gromova, M. ; Muller, Ph. ; Lauwagie, T.... - p. None , 2007
Link: https://doi.org/10.1109/MEMSYS.2007.4433173