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High-Q, tunable-gap MEMS variable capacitor actuated with a..:

, In: 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems,
Lee, Hyung Suk ; Yoon, Young Jun ; Choi, Dong-Hoon. - p. None , 2008
Link: https://doi.org/10.1109/MEMSYS.2008.4443622