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1 Ergebnisse
1
Fabricating capacitive micromachined ultrasonic transducers..:
, In:
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
,
Park, K.K.
;
Lee, H.J.
;
Kupnik, M.
.. - p. None , 2008
Link:
https://doi.org/10.1109/MEMSYS.2008.4443662
RT T1
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
: T1
Fabricating capacitive micromachined ultrasonic transducers with direct wafer-bonding and LOCOS technology
UL https://suche.suub.uni-bremen.de/peid=ieee-4443662&Exemplar=1&LAN=DE A1 Park, K.K. A1 Lee, H.J. A1 Kupnik, M. A1 Oralkan, O. A1 Khuri-Yakub, B.T. YR 2008 SN 1084-6999 K1 Ultrasonic transducers K1 Biomembranes K1 Etching K1 Fabrication K1 Oxidation K1 Parasitic capacitance K1 Ultrasonic imaging K1 Electrodes K1 Silicon on insulator technology K1 Rough surfaces SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2008.4443662 DO https://doi.org/10.1109/MEMSYS.2008.4443662 SF ELIB - SuUB Bremen
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