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1 Ergebnisse
1
Clean room Airborne Molecular Contamination (AMC) on damasc..:
, In:
2007 International Symposium on Semiconductor Manufacturing
,
Brennan, Bill
;
Lam, Kin Sang
;
Beckage, Pete
. - p. None , 2007
Link:
https://doi.org/10.1109/ISSM.2007.4446892
RT T1
2007 International Symposium on Semiconductor Manufacturing
: T1
Clean room Airborne Molecular Contamination (AMC) on damascene Cu interconnects
UL https://suche.suub.uni-bremen.de/peid=ieee-4446892&Exemplar=1&LAN=DE A1 Brennan, Bill A1 Lam, Kin Sang A1 Beckage, Pete A1 Hance, Bryon YR 2007 SN 1523-553X K1 Contamination K1 Copper K1 Artificial intelligence K1 Control systems K1 Manufacturing processes K1 Pulp manufacturing K1 Production facilities K1 Protection K1 Dielectrics K1 Chemical elements SP None LK http://dx.doi.org/https://doi.org/10.1109/ISSM.2007.4446892 DO https://doi.org/10.1109/ISSM.2007.4446892 SF ELIB - SuUB Bremen
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