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1 Ergebnisse
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Optimization of photo acid generator in the PAG-bonded resi..:
, In:
2007 Digest of papers Microprocesses and Nanotechnology
,
Fukkushima, Yasuyuki
;
Kinoshita, Hiroo
;
Ohnishi, Ryuji
... - p. None , 2007
Link:
https://doi.org/10.1109/IMNC.2007.4456288
RT T1
2007 Digest of papers Microprocesses and Nanotechnology
: T1
Optimization of photo acid generator in the PAG-bonded resist
UL https://suche.suub.uni-bremen.de/peid=ieee-4456288&Exemplar=1&LAN=DE A1 Fukkushima, Yasuyuki A1 Kinoshita, Hiroo A1 Ohnishi, Ryuji A1 Watanabe, Takeo A1 Shiotani, Hideaki A1 Suzuki, Shouta A1 Hayakawa, Masamichi A1 Endo, Yusuke A1 Yamanaka, Tomotaka A1 Yusa, Shinichi YR 2007 K1 Resists K1 Bonding K1 Writing K1 Ultraviolet sources K1 Resins K1 Lithography K1 Fabrication K1 Chemical technology K1 Polymers K1 Solvents SP None LK http://dx.doi.org/https://doi.org/10.1109/IMNC.2007.4456288 DO https://doi.org/10.1109/IMNC.2007.4456288 SF ELIB - SuUB Bremen
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