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1 Ergebnisse
1
A Novel Contact Imprinting Lithography for Nano-Patterning ..:
, In:
2007 Digest of papers Microprocesses and Nanotechnology
,
Lee, Y.-C.
;
Chiu, C.-Y.
- p. None , 2007
Link:
https://doi.org/10.1109/IMNC.2007.4456295
RT T1
2007 Digest of papers Microprocesses and Nanotechnology
: T1
A Novel Contact Imprinting Lithography for Nano-Patterning and Nano-Fabrication
UL https://suche.suub.uni-bremen.de/peid=ieee-4456295&Exemplar=1&LAN=DE A1 Lee, Y.-C. A1 Chiu, C.-Y. YR 2007 K1 Lithography K1 Polymer films K1 Silicon K1 Etching K1 Substrates K1 Semiconductor films K1 Gratings K1 Chromium K1 Plasma applications K1 Fabrication SP None LK http://dx.doi.org/https://doi.org/10.1109/IMNC.2007.4456295 DO https://doi.org/10.1109/IMNC.2007.4456295 SF ELIB - SuUB Bremen
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