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1 Ergebnisse
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Molecular engineering for future device structures: self-as..:
, In:
2007 Digest of papers Microprocesses and Nanotechnology
,
Whelan, C.M.
;
Caro, A. Maestre
;
Clemente, F.
... - p. None , 2007
Link:
https://doi.org/10.1109/IMNC.2007.4456304
RT T1
2007 Digest of papers Microprocesses and Nanotechnology
: T1
Molecular engineering for future device structures: self-assembled monolayers as diffusion barriers for Cu metallization
UL https://suche.suub.uni-bremen.de/peid=ieee-4456304&Exemplar=1&LAN=DE A1 Whelan, C.M. A1 Caro, A. Maestre A1 Clemente, F. A1 Beyer, G. A1 Tokei, Z. A1 Sutcliffe, V. YR 2007 K1 Metallization K1 Self-assembly K1 Surface resistance K1 Adhesives K1 Damascene integration K1 Passivation K1 Chemistry K1 Annealing K1 Silicides K1 Thermal stability SP None LK http://dx.doi.org/https://doi.org/10.1109/IMNC.2007.4456304 DO https://doi.org/10.1109/IMNC.2007.4456304 SF ELIB - SuUB Bremen
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