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Chemically Amplified Molecular Resists for E-Beam Lithograp..:

, In: 2007 Digest of papers Microprocesses and Nanotechnology,
Manyam, J. ; Gibbons, F.P. ; Diegoli, S.... - p. None , 2007
Link: https://doi.org/10.1109/IMNC.2007.4456338