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1 Ergebnisse
1
Thickness Characterization of Ultra Thin Wafers on Carrier:
, In:
2007 9th Electronics Packaging Technology Conference
,
Teixeira, R. C.
;
De Munck, K.
;
Baert, K.
... - p. None , 2007
Link:
https://doi.org/10.1109/EPTC.2007.4469740
RT T1 <cTitle>2007 9th Electronics Packaging Technology Conference</cTitle>: T1 <Title>Thickness Characterization of Ultra Thin Wafers on Carrier</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-4469740&Exemplar=1&LAN=DE A1 Teixeira, R. C. A1 De Munck, K. A1 Baert, K. A1 Swinnen, B. A1 Knuttel, A. A1 De Moor, P. YR 2007 K1 Thickness measurement K1 Pulse measurements K1 Intersymbol interference K1 Optical interferometry K1 Wavelength measurement K1 Stability K1 Light sources K1 Performance evaluation K1 Wafer bonding K1 Atmospheric measurements SP None LK http://dx.doi.org/https://doi.org/10.1109/EPTC.2007.4469740 DO https://doi.org/10.1109/EPTC.2007.4469740 SF ELIB - SuUB Bremen
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