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1 Ergebnisse
1
Development of Plasma-Damage Free Neutral Beam Sputtering S..:
, In:
2008 Flexible Electronics and Displays Conference and Exhibition
,
Jang, Jin-Nyoung
;
Park, Young Chun
;
Hong, MunPyo
... - p. None , 2008
Link:
https://doi.org/10.1109/FEDC.2008.4483884
RT T1 <cTitle>2008 Flexible Electronics and Displays Conference and Exhibition</cTitle>: T1 <Title>Development of Plasma-Damage Free Neutral Beam Sputtering System; High Performance Indium Tin Oxide Films at Room Temperature with Application to Top Emmission OLED</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-4483884&Exemplar=1&LAN=DE A1 Jang, Jin-Nyoung A1 Park, Young Chun A1 Hong, MunPyo A1 Lee, YouJong A1 Kim, JooHyoung A1 Yang, Ie-Hong A1 Oh, Kyoung Suk A1 Yoo, Suk Jae A1 Kim, Daechul A1 Lee, Bonju A1 Choi, Soung Woong YR 2008 SN 1947-1939 SN 1947-1947 K1 Plasma temperature K1 Plasma applications K1 Particle beams K1 Sputtering K1 Indium tin oxide K1 Organic light emitting diodes K1 Hyperthermia K1 Acceleration K1 Conductivity K1 Electrodes K1 HNB(Hyperthermal Neutral Beam) K1 ITO K1 Room Temperature K1 OLED K1 Damage Free SP None LK http://dx.doi.org/https://doi.org/10.1109/FEDC.2008.4483884 DO https://doi.org/10.1109/FEDC.2008.4483884 SF ELIB - SuUB Bremen
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