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1
Electromechanical Resonator Detection Enhancement by the Us..:
, In:
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems
,
Casset, F.
;
Durand, C.
;
Buchaillot, L.
... - p. None , 2008
Link:
https://doi.org/10.1109/ESIME.2008.4525026
RT T1 <cTitle>EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems</cTitle>: T1 <Title>Electromechanical Resonator Detection Enhancement by the Use of a Movable Electrode</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-4525026&Exemplar=1&LAN=DE A1 Casset, F. A1 Durand, C. A1 Buchaillot, L. A1 Ollier, E. A1 Ancey, P. A1 Aid, M. YR 2008 K1 Electrodes K1 Radio frequency K1 Equations K1 Q factor K1 Resonant frequency K1 Electrostatics K1 Vibrations K1 Optical coupling K1 Atmospheric measurements K1 Silicon SP None LK http://dx.doi.org/https://doi.org/10.1109/ESIME.2008.4525026 DO https://doi.org/10.1109/ESIME.2008.4525026 SF ELIB - SuUB Bremen
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