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High performance MEMS 0.18μm RF- CMOS inductors:

, In: 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems,
Ben Yishay, R. ; Stolyarova, S. ; Shapira, S.. - p. None , 2008
Link: https://doi.org/10.1109/COMCAS.2008.4562816