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1 Ergebnisse
1
Fabrication and Characterization of Surface-Micromachined C..:
, In:
2008 8th IEEE Conference on Nanotechnology
,
Lee, Jaewoo
;
Lee, H.-Y.
;
Moon, S.-E
... - p. None , 2008
Link:
https://doi.org/10.1109/NANO.2008.144
RT T1
2008 8th IEEE Conference on Nanotechnology
: T1
Fabrication and Characterization of Surface-Micromachined Compact Microheater for Gas Sensing Applications
UL https://suche.suub.uni-bremen.de/peid=ieee-4617126&Exemplar=1&LAN=DE A1 Lee, Jaewoo A1 Lee, H.-Y. A1 Moon, S.-E A1 Kwak, J.-H. A1 Park, S.-J. A1 Park, J.-H. A1 Park, K.-H. A1 Kim, Jongdae YR 2008 SN 1944-9399 K1 Biomembranes K1 Heating K1 Resistance K1 Resistance heating K1 Surface treatment K1 Silicon K1 Etching SP None LK http://dx.doi.org/https://doi.org/10.1109/NANO.2008.144 DO https://doi.org/10.1109/NANO.2008.144 SF ELIB - SuUB Bremen
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