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1 Ergebnisse
1
PMN-PT single crystal thick films on silicon substrate for ..:
, In:
2008 IEEE Ultrasonics Symposium
,
Peng, Jue
;
Sienting Lau
;
Chao, Chen
... - p. None , 2008
Link:
https://doi.org/10.1109/ULTSYM.2008.0039
RT T1
2008 IEEE Ultrasonics Symposium
: T1
PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers
UL https://suche.suub.uni-bremen.de/peid=ieee-4803311&Exemplar=1&LAN=DE A1 Peng, Jue A1 Sienting Lau A1 Chao, Chen A1 Dai, Jiyan A1 Chan, Helen L.W. A1 Haosu Lu A1 Zhou, Q.F. A1 Shung, K.K. YR 2008 SN 1051-0117 K1 Thick films K1 Silicon K1 Ultrasonic transducers K1 Crystallization K1 Substrates K1 Chemical technology K1 Micromachining K1 Wafer bonding K1 Lapping K1 Chemical processes K1 PMN-PT K1 pMUT K1 ultrasound transducer SP None LK http://dx.doi.org/https://doi.org/10.1109/ULTSYM.2008.0039 DO https://doi.org/10.1109/ULTSYM.2008.0039 SF ELIB - SuUB Bremen
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