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Packaging of 11 MPixel CMOS-Integrated SiGe Micro-Mirror Ar..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Witvrouw, A. ; Tilmans, H.A.C. ; Bogaerts, L.... - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805337