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Direct Etching of High Aspect Ratio Structures Through a St..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Villanueva, G. ; Vazquez-Mena, O. ; Hibert, C.. - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805339