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1 Ergebnisse
1
Glass Microprobe with Embedded Silicon Vias for 3D Integrat..:
, In:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
,
Lin, Chiung-Wen
;
Chang, Chih-Wei
;
Lee, Yu-Tao
... - p. None , 2009
Link:
https://doi.org/10.1109/MEMSYS.2009.4805353
RT T1
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
: T1
Glass Microprobe with Embedded Silicon Vias for 3D Integration
UL https://suche.suub.uni-bremen.de/peid=ieee-4805353&Exemplar=1&LAN=DE A1 Lin, Chiung-Wen A1 Chang, Chih-Wei A1 Lee, Yu-Tao A1 Chen, Rongshun A1 Chang, Yen-Chung A1 Fang, Weileun YR 2009 SN 1084-6999 K1 Glass K1 Silicon K1 Probes K1 Micromachining K1 Electrodes K1 Array signal processing K1 Assembly K1 Stacking K1 Shape control K1 Biomedical signal processing SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2009.4805353 DO https://doi.org/10.1109/MEMSYS.2009.4805353 SF ELIB - SuUB Bremen
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