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CMOS-Based High-Density Silicon Microprobe Array for Electr..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Seidl, K. ; Herwik, S. ; Nurcahyo, Y.... - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805361