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100 Nanometer Scale Resistive Heater-Thermometer on a Silic..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Dai, Zhenting ; Park, Keunhan ; King, William P. - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805439