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Fabrication of Electrostatically-Actuated, In-Plane Fused Q..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Hwang, Young-Suk ; Jung, Hyoung-Kyoon ; Song, Eun-Seok... - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805486