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1 Ergebnisse
1
A Low-Power Oven-Controlled Vacuum Package Technology for H..:
, In:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
,
Lee, S.-H.
;
Cho, J.
;
Lee, S. W.
... - p. None , 2009
Link:
https://doi.org/10.1109/MEMSYS.2009.4805492
RT T1
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
: T1
A Low-Power Oven-Controlled Vacuum Package Technology for High-Performance MEMS
UL https://suche.suub.uni-bremen.de/peid=ieee-4805492&Exemplar=1&LAN=DE A1 Lee, S.-H. A1 Cho, J. A1 Lee, S. W. A1 Zaman, M. F. A1 Ayazi, F. A1 Najafi, K. YR 2009 SN 1084-6999 K1 Vacuum technology K1 Packaging K1 Micromechanical devices K1 Isolation technology K1 Temperature K1 Microelectromechanical devices K1 Suspensions K1 Glass K1 Encapsulation K1 Vibrations SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2009.4805492 DO https://doi.org/10.1109/MEMSYS.2009.4805492 SF ELIB - SuUB Bremen
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