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A Multiple Degrees of Freedom Electrothermal Actuator for a..:

, In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems,
Chen, Dian-Sheng ; Yin, Chun-Yi ; Lai, Ren-Jie. - p. None , 2009
Link: https://doi.org/10.1109/MEMSYS.2009.4805563