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1 Ergebnisse
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A Multiple Degrees of Freedom Electrothermal Actuator for a..:
, In:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
,
Chen, Dian-Sheng
;
Yin, Chun-Yi
;
Lai, Ren-Jie
. - p. None , 2009
Link:
https://doi.org/10.1109/MEMSYS.2009.4805563
RT T1
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
: T1
A Multiple Degrees of Freedom Electrothermal Actuator for a Versatile MEMS Gripper
UL https://suche.suub.uni-bremen.de/peid=ieee-4805563&Exemplar=1&LAN=DE A1 Chen, Dian-Sheng A1 Yin, Chun-Yi A1 Lai, Ren-Jie A1 Tsai, Jui-che YR 2009 SN 1084-6999 K1 Electrothermal effects K1 Actuators K1 Micromechanical devices K1 Grippers K1 Silicon K1 Nickel K1 Temperature K1 Arm K1 Resistance heating K1 Thermal expansion SP None LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2009.4805563 DO https://doi.org/10.1109/MEMSYS.2009.4805563 SF ELIB - SuUB Bremen
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