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1 Ergebnisse
1
Energy harvesting by MEMS vibrational devices with electret:
, In:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
,
Sato, N.
;
Ono, K.
;
Shimamura, T.
... - p. None , 2009
Link:
https://doi.org/10.1109/SENSOR.2009.5285374
RT T1
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
: T1
Energy harvesting by MEMS vibrational devices with electrets
UL https://suche.suub.uni-bremen.de/peid=ieee-5285374&Exemplar=1&LAN=DE A1 Sato, N. A1 Ono, K. A1 Shimamura, T. A1 Kuwabara, K. A1 Ugajin, M. A1 Mutoh, S. A1 Morimura, H. A1 Ishii, H. A1 Kodate, J. YR 2009 SN 2159-547X SN 2164-1641 K1 Micromechanical devices K1 Electrets K1 Electrodes K1 Mechanical factors K1 Fabrication K1 Microelectromechanical devices K1 Couplings K1 Vibration measurement K1 Substrates K1 Laboratories K1 MEMS K1 Energy harvesting K1 Vibration K1 Electret K1 Slit-and-slide structure SP None LK http://dx.doi.org/https://doi.org/10.1109/SENSOR.2009.5285374 DO https://doi.org/10.1109/SENSOR.2009.5285374 SF ELIB - SuUB Bremen
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