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1 Ergebnisse
1
Laterally-driven deformation-robust MEMS gyroscopes with th..:
, In:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
,
Degawa, M.
;
Jeong, H.W.
;
Sonobe, H.
... - p. None , 2009
Link:
https://doi.org/10.1109/SENSOR.2009.5285412
RT T1 <cTitle>TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference</cTitle>: T1 <Title>Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-5285412&Exemplar=1&LAN=DE A1 Degawa, M. A1 Jeong, H.W. A1 Sonobe, H. A1 Takubo, C. A1 Yamanaka, K. A1 Goto, Y. YR 2009 SN 2159-547X SN 2164-1641 K1 Micromechanical devices K1 Gyroscopes K1 Suspensions K1 Temperature distribution K1 Microelectromechanical systems K1 Stability K1 Automotive engineering K1 Robots K1 Internal stresses K1 Temperature sensors K1 MEMS K1 gyroscopes K1 Coriolis force K1 High-reliability K1 deformation robust K1 folded-beams K1 spurious mode SP None LK http://dx.doi.org/https://doi.org/10.1109/SENSOR.2009.5285412 DO https://doi.org/10.1109/SENSOR.2009.5285412 SF ELIB - SuUB Bremen
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