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Energy loss in MEMS resonators and the impact on inertial a..:

, In: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference,
Weinberg, Marc ; Candler, Rob ; Chandorkar, Saurabh... - p. None , 2009
Link: https://doi.org/10.1109/SENSOR.2009.5285418