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1 Ergebnisse
1
Novel extension methods of the sensing pressure range of th..:
, In:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
,
Takashima, N.
;
Kimura, M.
- p. None , 2009
Link:
https://doi.org/10.1109/SENSOR.2009.5285737
RT T1
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
: T1
Novel extension methods of the sensing pressure range of the Pirani vacuum sensor
UL https://suche.suub.uni-bremen.de/peid=ieee-5285737&Exemplar=1&LAN=DE A1 Takashima, N. A1 Kimura, M. YR 2009 SN 2159-547X SN 2164-1641 K1 Temperature sensors K1 Thermal sensors K1 Thin film sensors K1 Pressure measurement K1 Temperature distribution K1 Thin film circuits K1 Gas detectors K1 Thermal conductivity K1 Thermal resistance K1 Diodes K1 Vacuum sensor K1 temperature sensor K1 thermocouple K1 cantilever K1 SOI K1 heater K1 vibration K1 Pirani SP None LK http://dx.doi.org/https://doi.org/10.1109/SENSOR.2009.5285737 DO https://doi.org/10.1109/SENSOR.2009.5285737 SF ELIB - SuUB Bremen
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