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Low leak rate mems valves for micro-gas-analyzer flow contr..:

, In: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference,
Galambos, P. ; Lantz, J.W. ; James, C.D.... - p. None , 2009
Link: https://doi.org/10.1109/SENSOR.2009.5285749