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Experiments with the LLNL large-area ICP plasma source:
, In:
International Conference on Plasma Science (papers in summary form only received)
,
Benjamin, R.D.
;
Egan, P.O.
;
Richardson, R.A.
- p. 119 , 1995
Link:
https://doi.org/10.1109/PLASMA.1995.531483
RT T1
International Conference on Plasma Science (papers in summary form only received)
: T1
Experiments with the LLNL large-area ICP plasma source
UL https://suche.suub.uni-bremen.de/peid=ieee-531483&Exemplar=1&LAN=DE A1 Benjamin, R.D. A1 Egan, P.O. A1 Richardson, R.A. YR 1995 SN 0730-9244 K1 Plasma sources K1 Plasma materials processing K1 Plasma measurements K1 Plasma applications K1 Plasma diagnostics K1 Probes K1 Coils K1 Argon K1 Stimulated emission K1 Spectroscopy SP 119 LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.1995.531483 DO https://doi.org/10.1109/PLASMA.1995.531483 SF ELIB - SuUB Bremen
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