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1 Ergebnisse
1
Determination of the relative concentration and the radial ..:
, In:
International Conference on Plasma Science (papers in summary form only received)
,
Yong-Jin Kim
;
Pyung-Woo Lee
;
Hong-Young Chang
- p. 154,155 , 1995
Link:
https://doi.org/10.1109/PLASMA.1995.531605
RT T1 <cTitle>International Conference on Plasma Science (papers in summary form only received)</cTitle>: T1 <Title>Determination of the relative concentration and the radial distribution of F radical atom concentration by plasma parameter normalization in ECR SF/sub 6//Ar discharge</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-531605&Exemplar=1&LAN=DE A1 Yong-Jin Kim A1 Pyung-Woo Lee A1 Hong-Young Chang YR 1995 SN 0730-9244 K1 Atomic measurements K1 Plasma measurements K1 Probes K1 Magnetic field measurement K1 Electrons K1 Atom optics K1 Plasma diagnostics K1 Plasma temperature K1 Nuclear and plasma sciences K1 Physics SP 154,155 LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.1995.531605 DO https://doi.org/10.1109/PLASMA.1995.531605 SF ELIB - SuUB Bremen
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