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A self-aligned silicidation technology for surround-gate ve..:

, In: 2009 Proceedings of the European Solid State Device Research Conference,
Hakim, M. M. A. ; Mallik, K. ; de-Groot, C. H.... - p. None , 2009
Link: https://doi.org/10.1109/ESSDERC.2009.5331579