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Dynamics of a close loop controlled MEMS actuator:

, In: 2009 2nd Microsystems and Nanoelectronics Research Conference,
Seleim, Abdulrahman ; Abdel-Rahman, Eihab ; Heppler, Glenn - p. None , 2009
Link: https://doi.org/10.1109/MNRC15848.2009.5338946