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1 Ergebnisse
1
The Modeling and Simulation of Reactive Ion Etching Rate Us..:
, In:
ESSDERC '89: 19th European Solid State Device Research Conference
,
Feng, Xiangming
;
Ruan, Gang
- p. None , 1989
Link:
https://doi.org/10.1007/978-3-642-52314-4_41
RT T1
ESSDERC '89: 19th European Solid State Device Research Conference
: T1
The Modeling and Simulation of Reactive Ion Etching Rate Using Statistical Method
UL https://suche.suub.uni-bremen.de/peid=ieee-5436633&Exemplar=1&LAN=DE A1 Feng, Xiangming A1 Ruan, Gang YR 1989 K1 Statistical analysis K1 Dry etching K1 Testing K1 Analytical models K1 Mathematics K1 Chemical analysis K1 Predictive models K1 Mathematical model K1 Microelectronics K1 Cost function SP None LK http://dx.doi.org/https://doi.org/10.1007/978-3-642-52314-4_41 DO https://doi.org/10.1007/978-3-642-52314-4_41 SF ELIB - SuUB Bremen
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