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1 Ergebnisse
1
Suppression of phosphorus diffusion using cluster Carbon co..:
, In:
2010 International Workshop on Junction Technology Extended Abstracts
,
Nagayama, Tsutomu
;
Onoda, Hiroshi
;
Tanjyo, Masayasu
... - p. 1-4 , 2010
Link:
https://doi.org/10.1109/IWJT.2010.5474979
RT T1 <cTitle>2010 International Workshop on Junction Technology Extended Abstracts</cTitle>: T1 <Title>Suppression of phosphorus diffusion using cluster Carbon co-implantation</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-5474979&Exemplar=1&LAN=DE A1 Nagayama, Tsutomu A1 Onoda, Hiroshi A1 Tanjyo, Masayasu A1 Hamamoto, Nariaki A1 Umisedo, Sei A1 Koga, Yuji A1 Maehara, Noriaki A1 Kawamura, Yasunori A1 Nakashima, Yoshiki A1 Hashino, Yoshikazu A1 Hashimoto, Masahiro A1 Yoshimi, Hideki A1 Sezaki, Shinichi A1 Nagai, Nobuo YR 2010 K1 Amorphous materials K1 Rapid thermal annealing K1 Silicon K1 Germanium K1 Mass spectroscopy K1 Electronic mail K1 Lattices K1 Transmission electron microscopy K1 Commercialization K1 Control systems SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWJT.2010.5474979 DO https://doi.org/10.1109/IWJT.2010.5474979 SF ELIB - SuUB Bremen
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