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Equipment characterization and integration building a found..:
, In:
IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings
,
Davis, G.
;
Symula, T.
- p. 80 , 1996
Link:
https://doi.org/10.1109/ASMC.1996.557976
RT T1 <cTitle>IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings</cTitle>: T1 <Title>Equipment characterization and integration building a foundation for quality</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-557976&Exemplar=1&LAN=DE A1 Davis, G. A1 Symula, T. YR 1996 SN 1078-8743 K1 Semiconductor device manufacture K1 Computer integrated manufacturing K1 Production facilities K1 Software tools K1 Software quality K1 Computer aided manufacturing K1 Productivity K1 Cost function K1 Software standards K1 Helium SP 80 LK http://dx.doi.org/https://doi.org/10.1109/ASMC.1996.557976 DO https://doi.org/10.1109/ASMC.1996.557976 SF ELIB - SuUB Bremen
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