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Cluster Carbon ion implantation for NMOS device fabrication..:

, In: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology,
Tanjyo, M. ; Onoda, H. ; Nagayama, T.... - p. 74-77 , 2010
Link: https://doi.org/10.1109/ICSICT.2010.5667848