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1 Ergebnisse
1
Simulation of remote plasma activated processing using elec..:
, In:
1990 Plasma Science IEEE Conference Record - Abstracts
,
Weng, Y.
;
Kushner, M.J.
- p. None , 1990
Link:
https://doi.org/10.1109/PLASMA.1990.110508
RT T1 <cTitle>1990 Plasma Science IEEE Conference Record - Abstracts</cTitle>: T1 <Title>Simulation of remote plasma activated processing using electron cyclotron resonance excited discharges</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-5725786&Exemplar=1&LAN=DE A1 Weng, Y. A1 Kushner, M.J. YR 1990 K1 Discharges (electric) K1 Plasmas K1 Electrons K1 Cathodes K1 Electric fields K1 Mathematical models K1 Saturation magnetization SP None LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.1990.110508 DO https://doi.org/10.1109/PLASMA.1990.110508 SF ELIB - SuUB Bremen
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