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Investigation of silicon substrate thickness effects on ind..:
, In:
ASIC, 2003. Proceedings. 5th International Conference on
,
Yong-Zhong Xiong, Yong-Zhong Xiong
- p. None , 2003
Link:
https://doi.org/10.1109/ICASIC.2003.1277410
RT T1
ASIC, 2003. Proceedings. 5th International Conference on
: T1
Investigation of silicon substrate thickness effects on inductor
UL https://suche.suub.uni-bremen.de/peid=ieee-5733598&Exemplar=1&LAN=DE A1 Yong-Zhong Xiong, Yong-Zhong Xiong YR 2003 SN 1523-553X K1 elemental semiconductors K1 inductors K1 metallisation K1 silicon K1 substrates K1 150 microns K1 50 microns K1 RF integrated circuits K1 RFIC K1 backside metallization effects K1 circular spiral inductor K1 inductor performance K1 inductor performances K1 power applications K1 quality factor K1 resonant frequency K1 substrate skin effect K1 substrate thickness effects K1 thermal conductivity K1 thinner substrate SP None LK http://dx.doi.org/https://doi.org/10.1109/ICASIC.2003.1277410 DO https://doi.org/10.1109/ICASIC.2003.1277410 SF ELIB - SuUB Bremen
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