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MEMS technology development and manufacturing in a CMOS fou..:

, In: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference,
Liu, C.M. ; Lin, Chung-Hsien ; Chung, Tien-Kan... - p. 807-810 , 2011
Link: https://doi.org/10.1109/TRANSDUCERS.2011.5969891