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Plasma uniformity issues in a 2/spl times/1 plasma-electrod..:

, In: IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science,
Fochs, S. ; Rhodes, M.A. ; Boley, C.D. - p. 168,169 , 1997
Link: https://doi.org/10.1109/PLASMA.1997.604492