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RF-MEMS switch module in a 0.25 μm BiCMOS technology:

, In: 2012 IEEE 12th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems,
Kaynak, M. ; Wietstruck, M. ; Zhang, W.... - p. 25-28 , 2012
Link: https://doi.org/10.1109/SiRF.2012.6160150