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1 Ergebnisse
1
Application of cluster Ion (carbon) implantation for strain..:
, In:
2012 12th International Workshop on Junction Technology
,
Sekar, Karuppanan
;
Tokoro, Nobuhiro
;
Onoda, Hiroshi
... - p. 42-47 , 2012
Link:
https://doi.org/10.1109/IWJT.2012.6212807
RT T1 <cTitle>2012 12th International Workshop on Junction Technology</cTitle>: T1 <Title>Application of cluster Ion (carbon) implantation for strain applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-6212807&Exemplar=1&LAN=DE A1 Sekar, Karuppanan A1 Tokoro, Nobuhiro A1 Onoda, Hiroshi A1 Nakashima, Yoshiki A1 Koga, Yuji A1 Hamamoto, Nariaki A1 Nagayama, Tsutomu A1 Herman, Joshua A1 Novak, Steve A1 Rodgers, Martin A1 Franca, Daniel A1 Vivekanand, Saikumar YR 2012 K1 Lasers K1 USA Councils K1 Abstracts K1 Systematics K1 Carbon K1 Implants K1 Lead SP 42 OP 47 LK http://dx.doi.org/https://doi.org/10.1109/IWJT.2012.6212807 DO https://doi.org/10.1109/IWJT.2012.6212807 SF ELIB - SuUB Bremen
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